A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

Measuring the wavelength-dependent divergence of transmission through sub-wavelength hole-arrays by spectral imaging.

We present a study on the far-field patterns of light transmitted through sub-wavelength metallic hole-arrays. Spectral imaging measurements are used here on hole arrays for the first time. It provides both spatial and spectral information of the transmission in far-field. The visibility of the images, measured in two illumination modes: Köhler and collimated, is calculated for different planes...

Coherent Polarization Transfer through Sub-wavelength Hole Arrays

We review a series of experiments on the optical properties of metal films perforated with arrays of sub-wavelength holes. A key experiment is the transfer of polarization entanglement under plane-wave/focused illumination, where we observed a conservation/degradation of the quantum entanglement. Surface plasmons play a prominent role in the observed extra-ordinary large transmission. This is d...

A CMOS-MEMS Thermopile with an Integrated Temperature Sensing Diode for Mid-IR Thermometry

In this paper, we describe an infrared thermopile sensor comprising of single crystal silicon p+ and n+ elements, with an integrated diode temperature sensor fabricated using a commercial SOI-CMOS process followed by Deep Reactive Ion Etching (DRIE). The chip area is 1.16 mm × 1.06 mm. The integrated diode, being on the same substrate, allows a more localized measurement of the cold junction te...

SOI-CMOS-MEMS Electrothermal Micromirror Arrays

SOI-CMOS Device Technology

In recent years, the mobile communication market represented by the mobile telephone has been showing remarkable growth. This market has been making tough demands for semiconductor integrated circuits, which are mounted components, to consume less power, have higher integration, have multi-function capability, and be faster. We at Oki have been working on developing complete depletion type SOI ...